TY - JOUR
T1 - An electron-spectroscopic view of CVD diamond surface conductivity
AU - Kono, S.
AU - Shiraishi, M.
AU - Goto, T.
AU - Abukawa, T.
AU - Tachiki, M.
AU - Kawarada, H.
N1 - Funding Information:
This work is partly supported by the Advanced Diamond Device Project of NEDO, Japan. Fruitful discussions with Dr. H. Okushi and with Dr. Y. Koide are acknowledged.
PY - 2005/3
Y1 - 2005/3
N2 - Three diamond (001) samples were made by CVD growth on synthetic diamond substrates in a same batch of growth, for which sheet resistance in atmospheric environment was confirmed. A simple two-point probe method has been applied to the samples to measure sheet resistance in UHV of 0.2-50 MΩ/square. Soft X-ray-induced secondary electron spectroscopy has been used to determine the Fermi level position in UHV of the samples for which in-UHV sheet resistance values were known. The Fermi level as measured turned out to be 1.1±0.2 eV above the valence band top and stayed at the same position within ∼0.1 eV with the sheet resistance change of an order of 2. On the basis of these findings, a plausible model of surface conductivity of CVD diamond is suggested.
AB - Three diamond (001) samples were made by CVD growth on synthetic diamond substrates in a same batch of growth, for which sheet resistance in atmospheric environment was confirmed. A simple two-point probe method has been applied to the samples to measure sheet resistance in UHV of 0.2-50 MΩ/square. Soft X-ray-induced secondary electron spectroscopy has been used to determine the Fermi level position in UHV of the samples for which in-UHV sheet resistance values were known. The Fermi level as measured turned out to be 1.1±0.2 eV above the valence band top and stayed at the same position within ∼0.1 eV with the sheet resistance change of an order of 2. On the basis of these findings, a plausible model of surface conductivity of CVD diamond is suggested.
KW - Diamond (001)
KW - Diamond growth and characterisation
KW - Secondary electron spectroscopy
KW - Surface conductivity
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U2 - 10.1016/j.diamond.2004.11.011
DO - 10.1016/j.diamond.2004.11.011
M3 - Article
AN - SCOPUS:18444414593
SN - 0925-9635
VL - 14
SP - 459
EP - 465
JO - Diamond and Related Materials
JF - Diamond and Related Materials
IS - 3-7
ER -