An extended auto-collimation method combined with a deflect optical system for non-contact profile measurement

Hiroki Shimizu; Yoji Watanabe; Wei Gao; Satoshi Kiyono

An extended auto-collimation method combined with a deflect optical system for non-contact profile measurement

Hiroki Shimizu, Yoji Watanabe, Wei Gao, Satoshi Kiyono

ENG - Finemechanics

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

A new laser auto-collimation method combining an optical system to deflect rays is proposed. This method expands the measuring range of auto-collimation method to hundreds of times and enables the profile measurement of fine finished curved surface like lenses, mirrors and molds. Experimental system is constructed and it is confirmed that profile error of concave mirror can be measured by the proposed method with a repeatability of 20nm.

Original language	English
Pages	249-252
Number of pages	4
Publication status	Published - 2005
Event	5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 - Montpellier, France Duration: 2005 May 8 → 2005 May 11

Other

Other	5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005
Country/Territory	France
City	Montpellier
Period	05/5/8 → 05/5/11

ASJC Scopus subject areas

Industrial and Manufacturing Engineering
Mechanical Engineering
Materials Science(all)
Environmental Engineering
Instrumentation

Cite this

An extended auto-collimation method combined with a deflect optical system for non-contact profile measurement. / Shimizu, Hiroki; Watanabe, Yoji; Gao, Wei et al.

2005. 249-252 Paper presented at 5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005, Montpellier, France.

Research output: Contribution to conference › Paper › peer-review

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abstract = "A new laser auto-collimation method combining an optical system to deflect rays is proposed. This method expands the measuring range of auto-collimation method to hundreds of times and enables the profile measurement of fine finished curved surface like lenses, mirrors and molds. Experimental system is constructed and it is confirmed that profile error of concave mirror can be measured by the proposed method with a repeatability of 20nm.",

author = "Hiroki Shimizu and Yoji Watanabe and Wei Gao and Satoshi Kiyono",

year = "2005",

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AU - Shimizu, Hiroki

AU - Watanabe, Yoji

AU - Gao, Wei

AU - Kiyono, Satoshi

PY - 2005

Y1 - 2005

N2 - A new laser auto-collimation method combining an optical system to deflect rays is proposed. This method expands the measuring range of auto-collimation method to hundreds of times and enables the profile measurement of fine finished curved surface like lenses, mirrors and molds. Experimental system is constructed and it is confirmed that profile error of concave mirror can be measured by the proposed method with a repeatability of 20nm.

AB - A new laser auto-collimation method combining an optical system to deflect rays is proposed. This method expands the measuring range of auto-collimation method to hundreds of times and enables the profile measurement of fine finished curved surface like lenses, mirrors and molds. Experimental system is constructed and it is confirmed that profile error of concave mirror can be measured by the proposed method with a repeatability of 20nm.

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UR - http://www.scopus.com/inward/citedby.url?scp=84919907495&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84919907495

SP - 249

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T2 - 5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005

Y2 - 8 May 2005 through 11 May 2005

ER -

An extended auto-collimation method combined with a deflect optical system for non-contact profile measurement

Abstract

Other

ASJC Scopus subject areas

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