@inproceedings{72e453091129409c96f251f2a2361a44,
title = "An outgas free passivation technology for semiconductor vacuum chamber using advanced anodic oxidation",
abstract = "Barrier type anodic oxides on aluminum-magnesium (Al-Mg) alloy in nonaqueous electrolyte solution are found to feature some excellent characteristics. Surface micro roughness is found by far less than that grown in aqueous electrolyte solution. Moisture outgassing from the barrier anodic oxides is very much limited. Even at elevated temperature, the barrier anodic oxides develop no heat cracks. They feature outstanding resistance to corrosive process gases. Anodization of Al-Mg alloys in nonaqueous electrolyte solution will be promising surface passivation of the semiconductor vacuum chambers. Copyright The Electrochemical Society.",
author = "Y. Kawase and M. Kitano and F. Mizutani and H. Morinaga and Y. Shirai and T. Ohmi",
year = "2006",
doi = "10.1149/1.2408929",
language = "English",
isbn = "9781566775205",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "9",
pages = "67--71",
booktitle = "Corrosion (General)",
edition = "9",
note = "209th ECS Meeting ; Conference date: 07-05-2006 Through 12-05-2006",
}