Abstract
We propose a nanomechanical channel drop switch by controlling the submicron distance between a nanocavity and photonic crystal (PC) waveguide with an ultrasmall electrostatic comb actuator. Light propagating in the PC waveguide is coupled with a nanocavity and emitted as a drop signal under a resonant condition. The proposed switch has been fabricated by silicon micromachining. The drop efficiency has been controlled by 12.5 dB and gap change of 600 nm.
Original language | English |
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Article number | 171911 |
Journal | Applied Physics Letters |
Volume | 95 |
Issue number | 17 |
DOIs | |
Publication status | Published - 2009 |