An XYθZ planar motion stage system driven by a surface motor for precision positioning

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

1 Citation (Scopus)


This chapter describes a surface motor-driven XYθZ stage system. The surface motor consists of two pairs of linear motors. The magnetic arrays are mounted on the moving element (platen) and the stator windings of the linear motors on the stage base. The platen can be moved in the X and Y directions by the X-linear motors and the Y-linear motors, respectively. It can also be rotated about the Z-axis by a moment generated by the X-or Y-linear motors. In the controller of the stage, a decoupled controlling element is employed to reduce the interference errors between the in-plane motions. A cascaded notch compensator is applied for dealing with the stage resonance. A disturbance observer is implemented to estimate and eliminate the influence of disturbance forces. A surface encoder is also developed to replace the conventional laser interferometers for XYθZ motion measurement.

Original languageEnglish
Title of host publicationSmart Devices and Machines for Advanced Manufacturing
PublisherSpringer London
Number of pages25
ISBN (Print)9781848001466
Publication statusPublished - 2008


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