Abstract
Relationships between growth conditions and atomic arrangements in InGaN thin films were investigated by Monte Carlo simulation incorporating data obtained from thermodynamic analyses and empirical interatomic potential calculations. The results suggest that compositional fluctuation was enhanced during the site-exchanging process instead of the adsorption process in the case of low indium input partial pressure. Moreover, it was found that no gross fluctuation in composition occurs but atomic-sized clustering occurs in thin films. The results agree with the experimental results [Smeeton et al., Appl. Phys. Lett. 83 (2003) 5419].
Original language | English |
---|---|
Pages (from-to) | 190-192 |
Number of pages | 3 |
Journal | Journal of Crystal Growth |
Volume | 298 |
Issue number | SPEC. ISS |
DOIs | |
Publication status | Published - 2007 Jan |
Externally published | Yes |
Keywords
- A1. Segregation
- A3. Metalorganic vapor phase epitaxy
- B1. Nitride
ASJC Scopus subject areas
- Condensed Matter Physics
- Inorganic Chemistry
- Materials Chemistry