Analysis of hard spring effect of tense poly-Si torsion bar of micromirror

Subrata Kumar Kundu; Shouhei Ogawa; Shinya Kumagai; Masayuki Fujishima; Kazuhiro Hane; Minoru Sasaki

doi:10.1109/OMEMS.2012.6318853

Analysis of hard spring effect of tense poly-Si torsion bar of micromirror

Subrata Kumar Kundu, Shouhei Ogawa, Shinya Kumagai, Masayuki Fujishima, Kazuhiro Hane, Minoru Sasaki

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The tense polycrystalline (poly-) Si torsion bar micromirror is advantageous to realize large rotation angle and stabilized temperature characteristics, simultaneously. In this paper, the hard spring effect of tense poly-Si torsion bar is characterized.

Original language	English
Title of host publication	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Pages	162-163
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2012.6318853
Publication status	Published - 2012 Nov 22
Event	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 - Banff, AB, Canada Duration: 2012 Aug 6 → 2012 Aug 9

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Other

Other	2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012
Country/Territory	Canada
City	Banff, AB
Period	12/8/6 → 12/8/9

Keywords

Electrostatic Actuation
Hard Spring Effect
MEMS Devices
Micromirror
Poly-Si Torsion Bar

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMEMS.2012.6318853

Cite this

Analysis of hard spring effect of tense poly-Si torsion bar of micromirror. / Kundu, Subrata Kumar; Ogawa, Shouhei; Kumagai, Shinya et al.
2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012. 2012. p. 162-163 6318853 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kundu, SK, Ogawa, S, Kumagai, S, Fujishima, M, Hane, K & Sasaki, M 2012, Analysis of hard spring effect of tense poly-Si torsion bar of micromirror. in 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012., 6318853, International Conference on Optical MEMS and Nanophotonics, pp. 162-163, 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012, Banff, AB, Canada, 12/8/6. https://doi.org/10.1109/OMEMS.2012.6318853

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title = "Analysis of hard spring effect of tense poly-Si torsion bar of micromirror",

abstract = "The tense polycrystalline (poly-) Si torsion bar micromirror is advantageous to realize large rotation angle and stabilized temperature characteristics, simultaneously. In this paper, the hard spring effect of tense poly-Si torsion bar is characterized.",

keywords = "Electrostatic Actuation, Hard Spring Effect, MEMS Devices, Micromirror, Poly-Si Torsion Bar",

author = "Kundu, {Subrata Kumar} and Shouhei Ogawa and Shinya Kumagai and Masayuki Fujishima and Kazuhiro Hane and Minoru Sasaki",

year = "2012",

month = nov,

day = "22",

doi = "10.1109/OMEMS.2012.6318853",

language = "English",

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series = "International Conference on Optical MEMS and Nanophotonics",

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T1 - Analysis of hard spring effect of tense poly-Si torsion bar of micromirror

AU - Kundu, Subrata Kumar

AU - Ogawa, Shouhei

AU - Kumagai, Shinya

AU - Fujishima, Masayuki

AU - Hane, Kazuhiro

AU - Sasaki, Minoru

PY - 2012/11/22

Y1 - 2012/11/22

N2 - The tense polycrystalline (poly-) Si torsion bar micromirror is advantageous to realize large rotation angle and stabilized temperature characteristics, simultaneously. In this paper, the hard spring effect of tense poly-Si torsion bar is characterized.

AB - The tense polycrystalline (poly-) Si torsion bar micromirror is advantageous to realize large rotation angle and stabilized temperature characteristics, simultaneously. In this paper, the hard spring effect of tense poly-Si torsion bar is characterized.

KW - Electrostatic Actuation

KW - Hard Spring Effect

KW - MEMS Devices

KW - Micromirror

KW - Poly-Si Torsion Bar

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DO - 10.1109/OMEMS.2012.6318853

M3 - Conference contribution

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T3 - International Conference on Optical MEMS and Nanophotonics

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BT - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012

T2 - 2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012

Y2 - 6 August 2012 through 9 August 2012

ER -

Analysis of hard spring effect of tense poly-Si torsion bar of micromirror

Abstract

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Keywords

ASJC Scopus subject areas

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