Analysis of surfaces and thin films by UV-visible reflectance spectroscopy

Nobuyoshi Hara

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


This review gives an overview of the principles and experimental methods of UV-visible reflectance spectroscopy including potential-modulated reflectance spectroscopy (PMRS) and real-time spectroscopic ellipsometry (RTSE). The capabilities of in-situ, non-invasive, surface-sensitive analysis are demonstrated for the composition determination of passive films using PMRS and for the real-time monitoring of thin film growth and dissolution processes using RTSE.

Original languageEnglish
Pages (from-to)446-452
Number of pages7
JournalZairyo to Kankyo/ Corrosion Engineering
Issue number10
Publication statusPublished - 2002


  • Chemical composition
  • Complex refractive index
  • Multichannel spectroscopic ellipsometer
  • Passive film
  • Potential-modulated reflectance spectroscopy
  • Real-time spectroscopic ellipsometry
  • Thin film growth
  • UV-visible reflectance spectroscopy

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrochemistry
  • Materials Chemistry


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