Abstract
This review gives an overview of the principles and experimental methods of UV-visible reflectance spectroscopy including potential-modulated reflectance spectroscopy (PMRS) and real-time spectroscopic ellipsometry (RTSE). The capabilities of in-situ, non-invasive, surface-sensitive analysis are demonstrated for the composition determination of passive films using PMRS and for the real-time monitoring of thin film growth and dissolution processes using RTSE.
| Original language | English |
|---|---|
| Pages (from-to) | 446-452 |
| Number of pages | 7 |
| Journal | Zairyo to Kankyo/ Corrosion Engineering |
| Volume | 51 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 2002 |
Keywords
- Chemical composition
- Complex refractive index
- Multichannel spectroscopic ellipsometer
- Passive film
- Potential-modulated reflectance spectroscopy
- Real-time spectroscopic ellipsometry
- Thin film growth
- UV-visible reflectance spectroscopy
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrochemistry
- Materials Chemistry