Thin film inductors with meander coil or spiral coil were examined systematically. The minimum line spacing of the Inductors was 1.5um. In case of air core Inductors, both inductance and stray capacitance are calculated from the dimension of the inductors and they agreed very well with measured ones. With the application of magnetic thin film, the inductance is increased and the degree of increase was proportional to the length of the coil. It is found that the capacitance between conductor and magnetic film is very significant and needs special consideration.