Analytical modeling of micromachined mechanical resonator sensor selfexcited by cw laser irradiation is presented. The optical feedback through the photothermal effect in the interference fringe generates the selfexcited vibration of the micromachined beams. The optical interference, thermal diffusion in the resonator and mechanical dynamics of the resonator are combined to maintain the oscillation. From the analysis, the following phenomena of the selfexcited vibration have been explained: (1) Threshold in light intensity to generate the vibration, (2) Saturation of the vibration amplitude, (3) Periodicity of the vibration excitation as a function of the displacement of the feedback mirror, (4) Bistability of the vibration center, (5) Frequency shift of the vibration.
|Number of pages||4|
|Publication status||Published - 1997|
|Event||Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA|
Duration: 1997 Jun 16 → 1997 Jun 19
|Conference||Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)|
|City||Chicago, IL, USA|
|Period||97/6/16 → 97/6/19|