Anisotropy control of magnetostrictive film patterns

Kouki Imamura; Kwang Ho Shin; Kazushi Ishiyama; Mitsuteru Inoue; Ken Ichi Arai

doi:10.1109/20.951042

Anisotropy control of magnetostrictive film patterns

Kouki Imamura, Kwang Ho Shin, Kazushi Ishiyama, Mitsuteru Inoue, Ken Ichi Arai

Human Information Systems Division

Research output: Contribution to journal › Conference article › peer-review

2 Citations (Scopus)

Abstract

The magnetic properties of Fe-based amorphous films are thought to be highly sensitive to strain due to the large saturation magnetostriction and soft magnetic properties exhibited by the films. This is why patterned FeCoSiB films exhibit a large variation in their high-frequency impedance when strain is applied. To increase the sensitivity of strain sensors, it is very important to control the magnitude of magnetic anisotropy. We propose a method to control the magnetic anisotropy by stress bias annealing. By applying stress during annealing, we were able to control the anisotropy along the width of the patterned film. A strain sensor using a transverse-anisotropy-induced film pattern exhibited a figure of merit F ≈ 8300, while a sensor without anisotropy exhibited the F only 500.

Original language	English
Pages (from-to)	2025-2027
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	37
Issue number	4 I
DOIs	https://doi.org/10.1109/20.951042
Publication status	Published - 2001 Jul
Event	8th Joint Magnetism and Magnetic Materials -International Magnetic Conference- (MMM-Intermag) - San Antonio, TX, United States Duration: 2001 Jan 7 → 2001 Jan 11

Keywords

Anisotropy control
High-frequency impedance
Magnetostrictive film
Strain sensitivity

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/20.951042

Cite this

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title = "Anisotropy control of magnetostrictive film patterns",

abstract = "The magnetic properties of Fe-based amorphous films are thought to be highly sensitive to strain due to the large saturation magnetostriction and soft magnetic properties exhibited by the films. This is why patterned FeCoSiB films exhibit a large variation in their high-frequency impedance when strain is applied. To increase the sensitivity of strain sensors, it is very important to control the magnitude of magnetic anisotropy. We propose a method to control the magnetic anisotropy by stress bias annealing. By applying stress during annealing, we were able to control the anisotropy along the width of the patterned film. A strain sensor using a transverse-anisotropy-induced film pattern exhibited a figure of merit F ≈ 8300, while a sensor without anisotropy exhibited the F only 500.",

keywords = "Anisotropy control, High-frequency impedance, Magnetostrictive film, Strain sensitivity",

author = "Kouki Imamura and Shin, {Kwang Ho} and Kazushi Ishiyama and Mitsuteru Inoue and Arai, {Ken Ichi}",

year = "2001",

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publisher = "Institute of Electrical and Electronics Engineers Inc.",

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note = "8th Joint Magnetism and Magnetic Materials -International Magnetic Conference- (MMM-Intermag) ; Conference date: 07-01-2001 Through 11-01-2001",

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T1 - Anisotropy control of magnetostrictive film patterns

AU - Imamura, Kouki

AU - Shin, Kwang Ho

AU - Ishiyama, Kazushi

AU - Inoue, Mitsuteru

AU - Arai, Ken Ichi

PY - 2001/7

Y1 - 2001/7

N2 - The magnetic properties of Fe-based amorphous films are thought to be highly sensitive to strain due to the large saturation magnetostriction and soft magnetic properties exhibited by the films. This is why patterned FeCoSiB films exhibit a large variation in their high-frequency impedance when strain is applied. To increase the sensitivity of strain sensors, it is very important to control the magnitude of magnetic anisotropy. We propose a method to control the magnetic anisotropy by stress bias annealing. By applying stress during annealing, we were able to control the anisotropy along the width of the patterned film. A strain sensor using a transverse-anisotropy-induced film pattern exhibited a figure of merit F ≈ 8300, while a sensor without anisotropy exhibited the F only 500.

AB - The magnetic properties of Fe-based amorphous films are thought to be highly sensitive to strain due to the large saturation magnetostriction and soft magnetic properties exhibited by the films. This is why patterned FeCoSiB films exhibit a large variation in their high-frequency impedance when strain is applied. To increase the sensitivity of strain sensors, it is very important to control the magnitude of magnetic anisotropy. We propose a method to control the magnetic anisotropy by stress bias annealing. By applying stress during annealing, we were able to control the anisotropy along the width of the patterned film. A strain sensor using a transverse-anisotropy-induced film pattern exhibited a figure of merit F ≈ 8300, while a sensor without anisotropy exhibited the F only 500.

KW - Anisotropy control

KW - High-frequency impedance

KW - Magnetostrictive film

KW - Strain sensitivity

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JF - IEEE Transactions on Magnetics

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Y2 - 7 January 2001 through 11 January 2001

ER -

Anisotropy control of magnetostrictive film patterns

Abstract

Keywords

ASJC Scopus subject areas

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