Annealing transformation of diamond-like carbon using Ni catalyst

Junji Sone, Naoto Shigeta, Katsumi Yamada, Takayuki Uchida, Shinya Yoshida, Takeshi Hayasaka, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


We have considered diamond-like carbon (DLC) graphitization by low-temperature annealing with a Ni catalyst, for MEMS usage with thick DLC films. For DLC films, annealing at 350-450 °C was effective for improving the I(D)/I(G) ratio of their Raman spectra, and their surface roughness was unaffected by the annealing temperature.

Original languageEnglish
Article number128005
JournalJapanese Journal of Applied Physics
Issue number12
Publication statusPublished - 2013 Dec


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