TY - JOUR
T1 - Annealing transformation of diamond-like carbon using Ni catalyst
AU - Sone, Junji
AU - Shigeta, Naoto
AU - Yamada, Katsumi
AU - Uchida, Takayuki
AU - Yoshida, Shinya
AU - Hayasaka, Takeshi
AU - Tanaka, Shuji
PY - 2013/12
Y1 - 2013/12
N2 - We have considered diamond-like carbon (DLC) graphitization by low-temperature annealing with a Ni catalyst, for MEMS usage with thick DLC films. For DLC films, annealing at 350-450 °C was effective for improving the I(D)/I(G) ratio of their Raman spectra, and their surface roughness was unaffected by the annealing temperature.
AB - We have considered diamond-like carbon (DLC) graphitization by low-temperature annealing with a Ni catalyst, for MEMS usage with thick DLC films. For DLC films, annealing at 350-450 °C was effective for improving the I(D)/I(G) ratio of their Raman spectra, and their surface roughness was unaffected by the annealing temperature.
UR - http://www.scopus.com/inward/record.url?scp=84892392070&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84892392070&partnerID=8YFLogxK
U2 - 10.7567/JJAP.52.128005
DO - 10.7567/JJAP.52.128005
M3 - Article
AN - SCOPUS:84892392070
SN - 0021-4922
VL - 52
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 12
M1 - 128005
ER -