Abstract
The possibility of antireflection (AR) coatings on a dielectric multilayer having sub-wavelength deep structural modification is investigated. We numerically surveyed the effect of reflectivity reduction attained by double-layer AR coatings for a wavy multilayer on a patterned substrate. It was clarified that double-layer AR coatings for wavy multilayer is possible with a similar performance level as conventional flat multilayer. Also, it was demonstrated that a pair of AR layers effectively works for a wide range of the horizontal pitch.
Original language | English |
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Pages (from-to) | 12249-12261 |
Number of pages | 13 |
Journal | Optics Express |
Volume | 18 |
Issue number | 12 |
DOIs | |
Publication status | Published - 2010 Jun 7 |