Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications

Ryunosuke Hino; Masayoshi Esashi; Shuji Tanaka

doi:10.1109/MEMSYS.2010.5442345

Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications

Ryunosuke Hino, Masayoshi Esashi, Shuji Tanaka

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

12 Citations (Scopus)

Abstract

A Lamb wave sensor to measure the concentration of methanol solution in direct methanol fuel cell (DMFC) systems was designed, fabricated and evaluated. The sensor piezoelectrically generates the lowest antisymmetric mode (A0-mode) Lamb wave on a suspended thin AlN/SiO₂/Si composite membrane, and confines a standing wave with edge reflectors. The fabricated sensor showed an almost constant sensitivity of 510 ppm/% in methanol concentration from 0 % to 100 %. The temperature coefficient of frequency (TCF) was found to be -31 ppm/K, which might approach zero by using a 1 μm thick buried oxide (BOX) layer.

Original language	English
Title of host publication	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages	871-874
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442345
Publication status	Published - 2010
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China Duration: 2010 Jan 24 → 2010 Jan 28

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/Territory	China
City	Hong Kong
Period	10/1/24 → 10/1/28

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2010.5442345

Cite this

Hino, R., Esashi, M., & Tanaka, S. (2010). Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 871-874). [5442345] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442345

Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications. / Hino, Ryunosuke; Esashi, Masayoshi; Tanaka, Shuji.
MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 871-874 5442345 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hino, R, Esashi, M & Tanaka, S 2010, Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442345, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 871-874, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 10/1/24. https://doi.org/10.1109/MEMSYS.2010.5442345

Hino R, Esashi M, Tanaka S. Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 871-874. 5442345. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2010.5442345

@inproceedings{d24c4eaecfb5451a96c62e2197610956,

title = "Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications",

abstract = "A Lamb wave sensor to measure the concentration of methanol solution in direct methanol fuel cell (DMFC) systems was designed, fabricated and evaluated. The sensor piezoelectrically generates the lowest antisymmetric mode (A0-mode) Lamb wave on a suspended thin AlN/SiO2/Si composite membrane, and confines a standing wave with edge reflectors. The fabricated sensor showed an almost constant sensitivity of 510 ppm/% in methanol concentration from 0 % to 100 %. The temperature coefficient of frequency (TCF) was found to be -31 ppm/K, which might approach zero by using a 1 μm thick buried oxide (BOX) layer.",

author = "Ryunosuke Hino and Masayoshi Esashi and Shuji Tanaka",

year = "2010",

doi = "10.1109/MEMSYS.2010.5442345",

language = "English",

isbn = "9781424457649",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "871--874",

booktitle = "MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest",

note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",

}

TY - GEN

T1 - Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications

AU - Hino, Ryunosuke

AU - Esashi, Masayoshi

AU - Tanaka, Shuji

PY - 2010

Y1 - 2010

N2 - A Lamb wave sensor to measure the concentration of methanol solution in direct methanol fuel cell (DMFC) systems was designed, fabricated and evaluated. The sensor piezoelectrically generates the lowest antisymmetric mode (A0-mode) Lamb wave on a suspended thin AlN/SiO2/Si composite membrane, and confines a standing wave with edge reflectors. The fabricated sensor showed an almost constant sensitivity of 510 ppm/% in methanol concentration from 0 % to 100 %. The temperature coefficient of frequency (TCF) was found to be -31 ppm/K, which might approach zero by using a 1 μm thick buried oxide (BOX) layer.

AB - A Lamb wave sensor to measure the concentration of methanol solution in direct methanol fuel cell (DMFC) systems was designed, fabricated and evaluated. The sensor piezoelectrically generates the lowest antisymmetric mode (A0-mode) Lamb wave on a suspended thin AlN/SiO2/Si composite membrane, and confines a standing wave with edge reflectors. The fabricated sensor showed an almost constant sensitivity of 510 ppm/% in methanol concentration from 0 % to 100 %. The temperature coefficient of frequency (TCF) was found to be -31 ppm/K, which might approach zero by using a 1 μm thick buried oxide (BOX) layer.

UR - http://www.scopus.com/inward/record.url?scp=77952763442&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77952763442&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2010.5442345

DO - 10.1109/MEMSYS.2010.5442345

M3 - Conference contribution

AN - SCOPUS:77952763442

SN - 9781424457649

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 871

EP - 874

BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest

T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010

Y2 - 24 January 2010 through 28 January 2010

ER -

Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications

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