Application of a semiconductor tip to capacitance microscopy

Kazuya Goto, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


A semiconductor tip has been applied to the scanning capacitance microscopy (SCM). Local electrostatic fields are measured through depletion of carriers at the tip end. A Si microcantilever with the sharp end is employed. This SCM technique has been used in a capacitance observation of a dielectric/electrode sample. Potentiometry using this technique is demonstrated in an experiment of charge injection recording on a polymer film.

Original languageEnglish
Pages (from-to)544-546
Number of pages3
JournalApplied Physics Letters
Issue number4
Publication statusPublished - 1998


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