Abstract
A semiconductor tip has been applied to the scanning capacitance microscopy (SCM). Local electrostatic fields are measured through depletion of carriers at the tip end. A Si microcantilever with the sharp end is employed. This SCM technique has been used in a capacitance observation of a dielectric/electrode sample. Potentiometry using this technique is demonstrated in an experiment of charge injection recording on a polymer film.
Original language | English |
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Pages (from-to) | 544-546 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 73 |
Issue number | 4 |
DOIs | |
Publication status | Published - 1998 |