Application of Bi-directional thin-film micro wire array to RF integrated spiral inductors

M. Yamaguchi; K. Suezawa; M. Baba; K. I. Arai; Y. Shimada; S. Tanabe; K. Itoh

doi:10.1109/20.908879

Application of Bi-directional thin-film micro wire array to RF integrated spiral inductors

M. Yamaguchi, K. Suezawa, M. Baba, K. I. Arai, Y. Shimada, S. Tanabe, K. Itoh

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Conference article › peer-review

33 Citations (Scopus)

Abstract

Vertically and horizontally aligned micro wire arrays with the magnetic hard axis perpendicular to the length of the wire are micro-fabricated from zero-magnetostrictive CoNbZr film. Annealing produced a 180-degree domain pattern, small coercive force and good permeability. Using the micro wire array with line/space = 9 μm/2 μm, an RF integrated inductor exhibited L = 7.5 nH(+11% of air core's), R = 7.6 Ω and Q = 6.3 (almost same as the air core's).

Original language	English
Pages (from-to)	3514-3517
Number of pages	4
Journal	IEEE Transactions on Magnetics
Volume	36
Issue number	5 I
DOIs	https://doi.org/10.1109/20.908879
Publication status	Published - 2000 Sept
Event	2000 International Magnetics Conference (INTERMAG 2000) - Toronto, Ont, Canada Duration: 2000 Apr 9 → 2000 Apr 12

Keywords

Bi-directional micro wire array
Complex permeability
Domain pattern
Hysteresis curve
Inductance
Microfabrication
Quality factor
RF integrated inductor

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10.1109/20.908879

Cite this

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title = "Application of Bi-directional thin-film micro wire array to RF integrated spiral inductors",

abstract = "Vertically and horizontally aligned micro wire arrays with the magnetic hard axis perpendicular to the length of the wire are micro-fabricated from zero-magnetostrictive CoNbZr film. Annealing produced a 180-degree domain pattern, small coercive force and good permeability. Using the micro wire array with line/space = 9 μm/2 μm, an RF integrated inductor exhibited L = 7.5 nH(+11% of air core's), R = 7.6 Ω and Q = 6.3 (almost same as the air core's).",

keywords = "Bi-directional micro wire array, Complex permeability, Domain pattern, Hysteresis curve, Inductance, Microfabrication, Quality factor, RF integrated inductor",

author = "M. Yamaguchi and K. Suezawa and M. Baba and Arai, {K. I.} and Y. Shimada and S. Tanabe and K. Itoh",

year = "2000",

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doi = "10.1109/20.908879",

language = "English",

volume = "36",

pages = "3514--3517",

journal = "IEEE Transactions on Magnetics",

issn = "0018-9464",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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note = "2000 International Magnetics Conference (INTERMAG 2000) ; Conference date: 09-04-2000 Through 12-04-2000",

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TY - JOUR

T1 - Application of Bi-directional thin-film micro wire array to RF integrated spiral inductors

AU - Yamaguchi, M.

AU - Suezawa, K.

AU - Baba, M.

AU - Arai, K. I.

AU - Shimada, Y.

AU - Tanabe, S.

AU - Itoh, K.

PY - 2000/9

Y1 - 2000/9

N2 - Vertically and horizontally aligned micro wire arrays with the magnetic hard axis perpendicular to the length of the wire are micro-fabricated from zero-magnetostrictive CoNbZr film. Annealing produced a 180-degree domain pattern, small coercive force and good permeability. Using the micro wire array with line/space = 9 μm/2 μm, an RF integrated inductor exhibited L = 7.5 nH(+11% of air core's), R = 7.6 Ω and Q = 6.3 (almost same as the air core's).

AB - Vertically and horizontally aligned micro wire arrays with the magnetic hard axis perpendicular to the length of the wire are micro-fabricated from zero-magnetostrictive CoNbZr film. Annealing produced a 180-degree domain pattern, small coercive force and good permeability. Using the micro wire array with line/space = 9 μm/2 μm, an RF integrated inductor exhibited L = 7.5 nH(+11% of air core's), R = 7.6 Ω and Q = 6.3 (almost same as the air core's).

KW - Bi-directional micro wire array

KW - Complex permeability

KW - Domain pattern

KW - Hysteresis curve

KW - Inductance

KW - Microfabrication

KW - Quality factor

KW - RF integrated inductor

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DO - 10.1109/20.908879

M3 - Conference article

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VL - 36

SP - 3514

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JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

IS - 5 I

T2 - 2000 International Magnetics Conference (INTERMAG 2000)

Y2 - 9 April 2000 through 12 April 2000

ER -

Application of Bi-directional thin-film micro wire array to RF integrated spiral inductors

Abstract

Keywords

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