TY - JOUR
T1 - Application of FIB with micro pick-up to microstructural study of irradiated SiC/SiC composites
AU - Ozawa, Kazumi
AU - Kondo, Sosuke
AU - Kishimoto, Hirotatsu
AU - Kohyama, Akira
PY - 2004
Y1 - 2004
N2 - The combination of focused ion beam (FIB) micro-processing and the lift-out technique using the micro pick-up system was applied to the preparation of TEM specimens of irradiated SiC/SiC composites. The deformation caused by microstructural evolution was observed in the pyrolitic carbon interphase, and several helium bubbles and cavities were detected in the CVI matrix.
AB - The combination of focused ion beam (FIB) micro-processing and the lift-out technique using the micro pick-up system was applied to the preparation of TEM specimens of irradiated SiC/SiC composites. The deformation caused by microstructural evolution was observed in the pyrolitic carbon interphase, and several helium bubbles and cavities were detected in the CVI matrix.
KW - FIB
KW - Irradiation effect
KW - Micro pick-up system
KW - Microstructural evolution
KW - SiC/SiC composite
KW - Swelling
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U2 - 10.1093/jmicro/dfh081
DO - 10.1093/jmicro/dfh081
M3 - Review article
C2 - 15582959
AN - SCOPUS:13444280481
SN - 0022-0744
VL - 53
SP - 519
EP - 521
JO - Journal of Electron Microscopy
JF - Journal of Electron Microscopy
IS - 5
ER -