Application of nanoimprint technology to diffraction grating scale for microrotary encoder

Toshihiro Takeshita, Takuma Iwasaki, Eiji Higurashi, Renshi Sawada

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


Using nanoimprint technology, we developed a rotary diffraction grating scale, which is used for microrotary encoding. The off-center error between the center of the throughhole for inserting a rotational axis and the center of the high-precision micropattern on the periphery of the scale is less than 3 μm because we are able to shape the through-hole and the grating pattern simultaneously. The rotary grating is of sufficient accuracy to use as the scale in a microrotary encoder. The use of nanoimprinting is groundbreaking, in view of the traditionally poor centering precision of grating scale through-holes fabricated by conventional photolithography coupled with the machining of throughholes.

Original languageEnglish
Pages (from-to)609-618
Number of pages10
JournalSensors and Materials
Issue number9
Publication statusPublished - 2013
Externally publishedYes


  • Diffracting grating
  • Nanoimprint
  • Optical mems
  • Rotary encoder

ASJC Scopus subject areas

  • Instrumentation
  • Materials Science(all)


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