@inproceedings{51d881a6e6234f9f93ccce04e756b1d2,
title = "Application of pyroelectric crystal and ionic liquid to the production of metal compounds",
abstract = "Zinc fluoride (ZnF2) was deposited on a silicon substrate by changing temperature of a pyroelectric crystal of LiTaO3 on which ionic liquid (EMI-Tf2N) containing zinc ions was dripped at 1 Pa. ZnF2 was also obtained by bombarding argon ions on EMI-Tf 2N containing zinc ions. From these results, it is concluded that EMI-Tf2N containing zinc ions on the LiTaO3 crystal was evaporated on the silicon substrate by changing temperature of the LiTaO 3 crystal in vacuum and that the evaporated EMI-Tf2N containing metal zinc ions was decomposed to ZnF2 by the bombardment of electrons accelerated by the electric field between the LiTaO3 crystal and the silicon substrate.",
keywords = "Ionic liquid, Metal fluoride, Pyroelectric crystal, XPS",
author = "Susumu Imashuku and Akira Imanishi and Jun Kawai",
year = "2013",
doi = "10.1063/1.4802338",
language = "English",
isbn = "9780735411487",
series = "AIP Conference Proceedings",
pages = "305--308",
booktitle = "Application of Accelerators in Research and Industry - Twenty-Second International Conference",
note = "22nd International Conference on the Application of Accelerators in Research and Industry, CAARI 2012 ; Conference date: 05-08-2012 Through 10-08-2012",
}