TY - GEN
T1 - Application of thin-film amorphous silicon to chemical imaging
AU - Yoshinobu, Tatsuo
AU - Moritz, Werner
AU - Finger, Friedhelm
AU - Schoening, Michael J.
PY - 2007/6/12
Y1 - 2007/6/12
N2 - A thin-film amorphous silicon (a-Si) deposited on a glass substrate was employed as a semiconductor material for the chemical imaging sensor, which can visualize the distribution of ion concentration in a solution. The sensing properties and the spatial resolution of the a-Si sensors were investigated. Nearly-Nernstian pH sensitivities and submicron resolution were demonstrated, which suggests the superior performance of the chemical imaging sensor based on thin-film a-Si.
AB - A thin-film amorphous silicon (a-Si) deposited on a glass substrate was employed as a semiconductor material for the chemical imaging sensor, which can visualize the distribution of ion concentration in a solution. The sensing properties and the spatial resolution of the a-Si sensors were investigated. Nearly-Nernstian pH sensitivities and submicron resolution were demonstrated, which suggests the superior performance of the chemical imaging sensor based on thin-film a-Si.
UR - http://www.scopus.com/inward/record.url?scp=34249936056&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34249936056&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:34249936056
SN - 1558998667
SN - 9781558998667
T3 - Materials Research Society Symposium Proceedings
SP - 481
EP - 490
BT - Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2006
T2 - 2006 MRS Spring Meeting
Y2 - 18 April 2006 through 20 April 2006
ER -