Application of Thin-Film Inductors to LC Filters

M. Yamaguchi, K. Ishihara, K. I. Arai

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


This paper discusses the application of thin-film inductors to thin-film based LC filters. The trial monolithic thin-film LC filter consists of thin-film inductors and thin-film capacitors, fabricated by the RF sputtering and ion-milling techniques. This filter is a second-order low-pass filter with a cut-off frequency of 50 MHz. We fabricated two kinds of filters using a non magnetic thin-film inductor or a magnetic thin-film inductor, and proved that magnetic thin-film permits to the reduction of the size and the insertion loss of the filter.

Original languageEnglish
Pages (from-to)3222-3224
Number of pages3
JournalIEEE Transactions on Magnetics
Issue number6
Publication statusPublished - 1993 Nov


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