Abstract
This paper discusses the application of thin-film inductors to thin-film based LC filters. The trial monolithic thin-film LC filter consists of thin-film inductors and thin-film capacitors, fabricated by the RF sputtering and ion-milling techniques. This filter is a second-order low-pass filter with a cut-off frequency of 50 MHz. We fabricated two kinds of filters using a non magnetic thin-film inductor or a magnetic thin-film inductor, and proved that magnetic thin-film permits to the reduction of the size and the insertion loss of the filter.
| Original language | English |
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| Pages (from-to) | 3222-3224 |
| Number of pages | 3 |
| Journal | IEEE Transactions on Magnetics |
| Volume | 29 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 1993 Nov |