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Application oriented MEMS
M. Esashi
Micro System Integration Center (μSIC)
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peer-review
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Engineering
Applications
25%
Capacitive
25%
Feedthrough
25%
Microelectromechanical System
100%
Molding
25%
Pressure Probe
25%
Rotational
25%
Sensor
25%
Silicon
50%
Silicon Material
25%