Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems

Gaopeng Xue; Masaya Toda; Takahito Ono

doi:10.1109/MEMSYS.2015.7050874

Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems

Gaopeng Xue, Masaya Toda, Takahito Ono

ENG - Mechanical Systems Engineering

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Citations (Scopus)

Abstract

In this research, we report the novel design, fabrication and testing of an assembled comb-drive XYZ-microstage that produces highly decoupled motions into X-, Y-, and Z-directions for the three-dimensional (3D) scanning stage of magnetic resonance force microscopy. The XYZ-microstage based on assembling technology consists of three separated parts, i.e., a comb-drive XY-microstage, two comb-drive Z-microstages and a bottom silicon base substrate. The separated parts are assembled together by using micro manipulators and a guide block of stainless steel. It is demonstrated that the assembled XYZ-microstage can achieve large displacements of 25.2 μm in X direction, 20.4 μm in Y direction and 58.5 μm in Z direction.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	14-17
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7050874
Publication status	Published - 2015 Feb 26
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Conference

Conference	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	15/1/18 → 15/1/22

Access to Document

10.1109/MEMSYS.2015.7050874

Cite this

Xue, G., Toda, M., & Ono, T. (2015). Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 14-17). Article 7050874 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050874

Xue, Gaopeng ; Toda, Masaya ; Ono, Takahito. / Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 14-17 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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abstract = "In this research, we report the novel design, fabrication and testing of an assembled comb-drive XYZ-microstage that produces highly decoupled motions into X-, Y-, and Z-directions for the three-dimensional (3D) scanning stage of magnetic resonance force microscopy. The XYZ-microstage based on assembling technology consists of three separated parts, i.e., a comb-drive XY-microstage, two comb-drive Z-microstages and a bottom silicon base substrate. The separated parts are assembled together by using micro manipulators and a guide block of stainless steel. It is demonstrated that the assembled XYZ-microstage can achieve large displacements of 25.2 μm in X direction, 20.4 μm in Y direction and 58.5 μm in Z direction.",

author = "Gaopeng Xue and Masaya Toda and Takahito Ono",

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Xue, G, Toda, M & Ono, T 2015, Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7050874, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 14-17, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7050874

Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems. / Xue, Gaopeng; Toda, Masaya ; Ono, Takahito.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 14-17 7050874 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - In this research, we report the novel design, fabrication and testing of an assembled comb-drive XYZ-microstage that produces highly decoupled motions into X-, Y-, and Z-directions for the three-dimensional (3D) scanning stage of magnetic resonance force microscopy. The XYZ-microstage based on assembling technology consists of three separated parts, i.e., a comb-drive XY-microstage, two comb-drive Z-microstages and a bottom silicon base substrate. The separated parts are assembled together by using micro manipulators and a guide block of stainless steel. It is demonstrated that the assembled XYZ-microstage can achieve large displacements of 25.2 μm in X direction, 20.4 μm in Y direction and 58.5 μm in Z direction.

AB - In this research, we report the novel design, fabrication and testing of an assembled comb-drive XYZ-microstage that produces highly decoupled motions into X-, Y-, and Z-directions for the three-dimensional (3D) scanning stage of magnetic resonance force microscopy. The XYZ-microstage based on assembling technology consists of three separated parts, i.e., a comb-drive XY-microstage, two comb-drive Z-microstages and a bottom silicon base substrate. The separated parts are assembled together by using micro manipulators and a guide block of stainless steel. It is demonstrated that the assembled XYZ-microstage can achieve large displacements of 25.2 μm in X direction, 20.4 μm in Y direction and 58.5 μm in Z direction.

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Xue G, Toda M , Ono T. Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 14-17. 7050874. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7050874

Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems

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