A1 mode Lamb wave on thin LiTaO3 for high frequency acoustic devices

Najoua Assila; Michio Kadota; Yuji Ohashi; Shuji Tanaka

doi:10.1109/NEMS.2016.7758293

A₁ mode Lamb wave on thin LiTaO₃ for high frequency acoustic devices

Najoua Assila, Michio Kadota, Yuji Ohashi, Shuji Tanaka

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The Lamb waves and horizontal shear waves' propagation in LiTaO₃ thin plate is investigated as a function of Euler angles. Both velocity and electromechanical coupling factor largely depend on the plate's thickness. Around (0°, 30°, 0°), LiTaO₃ thin plate has a high velocity and a suitable coupling factor for a high frequency filter. Authors fabricated A₁ mode Lamb wave resonators in (0°, 39°, 0°) LiTaO₃'s thin plate. Lamb waves' velocities and leaky Lamb wave' velocities were measured by network analyzer and ultrasonic microscopy. Measured velocities correspond to the ones calculated by FEM. Velocities higher than 20,000 m/s were obtained. It is then shown that A₁ mode Lamb wave close to (0°, 30°, 0°) LiTaO₃ thin plate is suitable for high frequency devices.

Original language	English
Title of host publication	2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	473-477
Number of pages	5
ISBN (Electronic)	9781509019472
DOIs	https://doi.org/10.1109/NEMS.2016.7758293
Publication status	Published - 2016 Nov 28
Event	11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 - Sendai, Japan Duration: 2016 Apr 17 → 2016 Apr 20

Publication series

Name	2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016

Conference

Conference	11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
Country/Territory	Japan
City	Sendai
Period	16/4/17 → 16/4/20

Keywords

A mode
bandwidth
frequency
Interdigital transducer
LiTaO
resonance

Access to Document

10.1109/NEMS.2016.7758293

Cite this

Assila, N., Kadota, M., Ohashi, Y., & Tanaka, S. (2016). A₁ mode Lamb wave on thin LiTaO₃ for high frequency acoustic devices. In 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 (pp. 473-477). Article 7758293 (2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2016.7758293

Assila, Najoua ; Kadota, Michio ; Ohashi, Yuji et al. / A₁ mode Lamb wave on thin LiTaO₃ for high frequency acoustic devices. 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 473-477 (2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016).

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title = "A1 mode Lamb wave on thin LiTaO3 for high frequency acoustic devices",

abstract = "The Lamb waves and horizontal shear waves' propagation in LiTaO3 thin plate is investigated as a function of Euler angles. Both velocity and electromechanical coupling factor largely depend on the plate's thickness. Around (0°, 30°, 0°), LiTaO3 thin plate has a high velocity and a suitable coupling factor for a high frequency filter. Authors fabricated A1 mode Lamb wave resonators in (0°, 39°, 0°) LiTaO3's thin plate. Lamb waves' velocities and leaky Lamb wave' velocities were measured by network analyzer and ultrasonic microscopy. Measured velocities correspond to the ones calculated by FEM. Velocities higher than 20,000 m/s were obtained. It is then shown that A1 mode Lamb wave close to (0°, 30°, 0°) LiTaO3 thin plate is suitable for high frequency devices.",

keywords = "A mode, bandwidth, frequency, Interdigital transducer, LiTaO, resonance",

author = "Najoua Assila and Michio Kadota and Yuji Ohashi and Shuji Tanaka",

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doi = "10.1109/NEMS.2016.7758293",

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series = "2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016",

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Assila, N, Kadota, M, Ohashi, Y & Tanaka, S 2016, A₁ mode Lamb wave on thin LiTaO₃ for high frequency acoustic devices. in 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016., 7758293, 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Institute of Electrical and Electronics Engineers Inc., pp. 473-477, 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, 16/4/17. https://doi.org/10.1109/NEMS.2016.7758293

A₁ mode Lamb wave on thin LiTaO₃ for high frequency acoustic devices. / Assila, Najoua; Kadota, Michio; Ohashi, Yuji et al.
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016. Institute of Electrical and Electronics Engineers Inc., 2016. p. 473-477 7758293 (2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - The Lamb waves and horizontal shear waves' propagation in LiTaO3 thin plate is investigated as a function of Euler angles. Both velocity and electromechanical coupling factor largely depend on the plate's thickness. Around (0°, 30°, 0°), LiTaO3 thin plate has a high velocity and a suitable coupling factor for a high frequency filter. Authors fabricated A1 mode Lamb wave resonators in (0°, 39°, 0°) LiTaO3's thin plate. Lamb waves' velocities and leaky Lamb wave' velocities were measured by network analyzer and ultrasonic microscopy. Measured velocities correspond to the ones calculated by FEM. Velocities higher than 20,000 m/s were obtained. It is then shown that A1 mode Lamb wave close to (0°, 30°, 0°) LiTaO3 thin plate is suitable for high frequency devices.

AB - The Lamb waves and horizontal shear waves' propagation in LiTaO3 thin plate is investigated as a function of Euler angles. Both velocity and electromechanical coupling factor largely depend on the plate's thickness. Around (0°, 30°, 0°), LiTaO3 thin plate has a high velocity and a suitable coupling factor for a high frequency filter. Authors fabricated A1 mode Lamb wave resonators in (0°, 39°, 0°) LiTaO3's thin plate. Lamb waves' velocities and leaky Lamb wave' velocities were measured by network analyzer and ultrasonic microscopy. Measured velocities correspond to the ones calculated by FEM. Velocities higher than 20,000 m/s were obtained. It is then shown that A1 mode Lamb wave close to (0°, 30°, 0°) LiTaO3 thin plate is suitable for high frequency devices.

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Assila N, Kadota M, Ohashi Y , Tanaka S. A₁ mode Lamb wave on thin LiTaO₃ for high frequency acoustic devices. In 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016. Institute of Electrical and Electronics Engineers Inc. 2016. p. 473-477. 7758293. (2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016). doi: 10.1109/NEMS.2016.7758293