TY - JOUR
T1 - Atom probe analysis of a nanocrystalline Fe-C-Ta sputtered soft magnetic thin film
AU - Hono, K.
AU - Hasegawa, N.
AU - Babu, S. S.
AU - Fujimori, H.
AU - Sakurai, T.
N1 - Funding Information:
Partial financial supports for this study by the Iron and Steel Institute of Japan, the Murata Science Foundation and a Grant-in-Aid for Scientific Research on Priority Areas (No. 02254101-5, "Metallic Artificial superlattice") from the Ministry of Education are deeply appreciated.
PY - 1993/4/2
Y1 - 1993/4/2
N2 - Sputtered Fe-10.3at%C-8.3at%Ta magnetic thin films annealed below 650°C were analyzed by the atom probe method in order to elucidate the mechanism of formation of the nanocrystalline structure. In the as-deposited amorphous film, evidence for significant variation of the carbon concentration was found. By annealing below the crystallization temperature, the degree of fluctuation of the carbon concentration appeared to be enhanced. After heat treatment for optimum soft magnetic properties, TaC was observed. In this condition, substantial amounts of supersaturated C and Ta were still dissolved in the α-Fe phase.
AB - Sputtered Fe-10.3at%C-8.3at%Ta magnetic thin films annealed below 650°C were analyzed by the atom probe method in order to elucidate the mechanism of formation of the nanocrystalline structure. In the as-deposited amorphous film, evidence for significant variation of the carbon concentration was found. By annealing below the crystallization temperature, the degree of fluctuation of the carbon concentration appeared to be enhanced. After heat treatment for optimum soft magnetic properties, TaC was observed. In this condition, substantial amounts of supersaturated C and Ta were still dissolved in the α-Fe phase.
UR - http://www.scopus.com/inward/record.url?scp=0027266475&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0027266475&partnerID=8YFLogxK
U2 - 10.1016/0169-4332(93)90343-A
DO - 10.1016/0169-4332(93)90343-A
M3 - Article
AN - SCOPUS:0027266475
SN - 0169-4332
VL - 67
SP - 391
EP - 397
JO - Applied Surface Science
JF - Applied Surface Science
IS - 1-4
ER -