Atom probe microscopy of three-dimensional distribution of silicon isotopes in Si28 / Si30isotope superlattices with sub-nanometer spatial resolution

Yasuo Shimizu; Yoko Kawamura; Masashi Uematsu; Kohei M. Itoh; Mitsuhiro Tomita; Mikio Sasaki; Hiroshi Uchida; Mamoru Takahashi

doi:10.1063/1.3236673

Atom probe microscopy of three-dimensional distribution of silicon isotopes in Si²⁸ / Si³⁰isotope superlattices with sub-nanometer spatial resolution

Yasuo Shimizu, Yoko Kawamura, Masashi Uematsu, Kohei M. Itoh, Mitsuhiro Tomita, Mikio Sasaki, Hiroshi Uchida, Mamoru Takahashi

Research output: Contribution to journal › Article › peer-review

33 Citations (Scopus)

Abstract

Laser-assisted atom probe microscopy of 2 nm period Si²⁸ / Si³⁰isotope superlattices (SLs) is reported. Three-dimensional distributions of Si²⁸ and Si³⁰ stable isotopes are obtained with sub-nanometer spatial resolution. The depth resolution of the present atom probe analysis is much higher than that of secondary ion mass spectrometry (SIMS) even when SIMS is performed with a great care to reduce the artifact due to atomic mixing. Outlook of Si isotope SLs as ideal depth scales for SIMS and three-dimensional position standards for atom probe microscopy is discussed.

Original language	English
Article number	076102
Journal	Journal of Applied Physics
Volume	106
Issue number	7
DOIs	https://doi.org/10.1063/1.3236673
Publication status	Published - 2009
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.3236673

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title = "Atom probe microscopy of three-dimensional distribution of silicon isotopes in Si28 / Si30isotope superlattices with sub-nanometer spatial resolution",

abstract = "Laser-assisted atom probe microscopy of 2 nm period Si28 / Si30isotope superlattices (SLs) is reported. Three-dimensional distributions of Si28 and Si30 stable isotopes are obtained with sub-nanometer spatial resolution. The depth resolution of the present atom probe analysis is much higher than that of secondary ion mass spectrometry (SIMS) even when SIMS is performed with a great care to reduce the artifact due to atomic mixing. Outlook of Si isotope SLs as ideal depth scales for SIMS and three-dimensional position standards for atom probe microscopy is discussed.",

author = "Yasuo Shimizu and Yoko Kawamura and Masashi Uematsu and Itoh, {Kohei M.} and Mitsuhiro Tomita and Mikio Sasaki and Hiroshi Uchida and Mamoru Takahashi",

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journal = "Journal of Applied Physics",

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T1 - Atom probe microscopy of three-dimensional distribution of silicon isotopes in Si28 / Si30isotope superlattices with sub-nanometer spatial resolution

AU - Shimizu, Yasuo

AU - Kawamura, Yoko

AU - Uematsu, Masashi

AU - Itoh, Kohei M.

AU - Tomita, Mitsuhiro

AU - Sasaki, Mikio

AU - Uchida, Hiroshi

AU - Takahashi, Mamoru

PY - 2009

Y1 - 2009

N2 - Laser-assisted atom probe microscopy of 2 nm period Si28 / Si30isotope superlattices (SLs) is reported. Three-dimensional distributions of Si28 and Si30 stable isotopes are obtained with sub-nanometer spatial resolution. The depth resolution of the present atom probe analysis is much higher than that of secondary ion mass spectrometry (SIMS) even when SIMS is performed with a great care to reduce the artifact due to atomic mixing. Outlook of Si isotope SLs as ideal depth scales for SIMS and three-dimensional position standards for atom probe microscopy is discussed.

AB - Laser-assisted atom probe microscopy of 2 nm period Si28 / Si30isotope superlattices (SLs) is reported. Three-dimensional distributions of Si28 and Si30 stable isotopes are obtained with sub-nanometer spatial resolution. The depth resolution of the present atom probe analysis is much higher than that of secondary ion mass spectrometry (SIMS) even when SIMS is performed with a great care to reduce the artifact due to atomic mixing. Outlook of Si isotope SLs as ideal depth scales for SIMS and three-dimensional position standards for atom probe microscopy is discussed.

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ER -

Atom probe microscopy of three-dimensional distribution of silicon isotopes in Si²⁸ / Si³⁰isotope superlattices with sub-nanometer spatial resolution

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