@inbook{17924afe479c47d883b0c9c96ac30873,
title = "Atomically Controlled Processing for Future Si-Based Devices",
keywords = "Automatically controlled processing, Chemical vapor deposition, CVD processing, Depth dependence, Low temperature processing",
author = "Junichi Murota and Masao Sakuraba and Bernd Tillack",
year = "2007",
month = jan,
day = "22",
doi = "10.1002/9780470168264.ch22",
language = "English",
isbn = "9780470081464",
pages = "246--258",
booktitle = "Future Trends in Microelectronics",
publisher = "John Wiley & Sons, Inc.",
}