Au Flat Micro-Bump Arrays Fabricated by Transfer and Coining of Au Thin Films

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Au flat micro-bump arrays that facilitate low-pressure Au-Au bonding were fabricated by the process based on Au thin film transfer and coining of Au hollow structure. High die shear strength was achieved between Au flat bumps and Au sputter films with a low bonding pressure of 10 MPa at 150°C.

Original languageEnglish
Title of host publication2024 8th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2024
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798331519919
DOIs
Publication statusPublished - 2024
Event8th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2024 - Nara, Japan
Duration: 2024 Oct 302024 Nov 1

Publication series

Name2024 8th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2024

Conference

Conference8th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2024
Country/TerritoryJapan
CityNara
Period24/10/3024/11/1

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