Abstract
A new magnetostrictive thin-film cantilever actuator and a new thin-film walking mechanism were developed. The actuators were made of magnetostrictive amorphous Tb-Fe and Sm-Fe thin films, deposited on the opposite sides of a polyimide film substrate. These actuators need not power supply cables because they were remotely driven by external magnetic fields. The static deflection of a 3-mm-long cantilever actuator was as large as 100 μm at 300 Oe field. Moreover the application of ac resonant frequency field of the same intensity yielded deflection of above 500 pm. The walking mechanism ran as fast as in the order of cm/s. The forward and backward running were possible depending on the frequency of applied magnetic field. Such unique characteristics suggest that magnetostrictive thin-film actuators are useful in MEMS applications.
| Original language | English |
|---|---|
| Pages (from-to) | 232-237 |
| Number of pages | 6 |
| Journal | IEICE Transactions on Electronics |
| Volume | E80-C |
| Issue number | 2 |
| Publication status | Published - 1997 |
Keywords
- Cantilever
- Magnetostriction
- Sm-Fe thin film
- Tb-Fe thin film
- Walking mechanism
- Wireless remote operation