TY - GEN
T1 - Broadband antireflection for III-V semiconductors by subwavelength surface grating structures
AU - Yugami, Hiroo
AU - Kanamori, Yoshiaki
AU - Kobayashi, Kenichi
AU - Hane, Kazuhiro
PY - 2003
Y1 - 2003
N2 - Recently, it is demonstrated that the subwavelength grating (SWG), which is the surface-relief grating with the period smaller than the wavelength of light, behaves as an antireflection surface. In particular, a tapered SWG suppresses reflection over a wide spectral bandwidth. The SWS is more stable than the multulayered thin film, since it is fabricated from a single material. In this study, we demonstrate broadband antirefraction properties of III-V materials (GaSb) by using SWG. The surface nano-structures with 200-350nm periods are fabricated by means of electron beam lithography and fast atom beam (FAB) etching. The reflectivity of the sample is strongly suppressed from the visible to near IR region. The experimental data is compared with numerical simulations using the rigorous coupled analysis (RCWA).
AB - Recently, it is demonstrated that the subwavelength grating (SWG), which is the surface-relief grating with the period smaller than the wavelength of light, behaves as an antireflection surface. In particular, a tapered SWG suppresses reflection over a wide spectral bandwidth. The SWS is more stable than the multulayered thin film, since it is fabricated from a single material. In this study, we demonstrate broadband antirefraction properties of III-V materials (GaSb) by using SWG. The surface nano-structures with 200-350nm periods are fabricated by means of electron beam lithography and fast atom beam (FAB) etching. The reflectivity of the sample is strongly suppressed from the visible to near IR region. The experimental data is compared with numerical simulations using the rigorous coupled analysis (RCWA).
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M3 - Conference contribution
AN - SCOPUS:6344294427
SN - 4990181603
SN - 9784990181604
T3 - Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion
SP - 2710
EP - 2713
BT - Proceddings of the 3rd World Conference on Photovoltaic Energy Conversion
A2 - Kurokawa, K.
A2 - Kazmerski, L.L.
A2 - McNeils, B.
A2 - Yamaguchi, M.
A2 - Wronski, C.
T2 - Proceddings of the 3rd World Conference on Photovoltaic Energy Conversion
Y2 - 11 May 2003 through 18 May 2003
ER -