Bulk micromachining for sensors and actuators

Deep reactive ion etching (RIE) was developed not only for silicon but also other materials and silicon microstructures made by the deep RIE was used as molds for making ceramic microstructures. Key elements of systems such as microactuators to generate a large force and microprobes for future data storage device were described. Packaged micromechanical sensors as pressure sensors and electrostatically levitating micromotors for gyroscopes were developed. Active catheters which move like snakes in blood vessels and sensors for the catheter were studied for the purpose of minimal invasive medicine. Basic problems like Q of resonators and the electrical discharge of electrostatic microactuators were the topics of the research.