Bundled aluminum hollow-core fibers for delivery of ultraviolet laser beams

Ozgur Yilmaz; Yuji Matsuura; Mitsunobu Miyagi

doi:10.1117/1.2077047

Bundled aluminum hollow-core fibers for delivery of ultraviolet laser beams

Ozgur Yilmaz, Yuji Matsuura, Mitsunobu Miyagi

MEN - Biomedical Engineering

Tohoku University

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

A bundle of aluminum hollow-core fibers is used to deliver ArF-excimer-laser light. The hollow cores are purged by a simple gas injection system to prevent the generation of ozone gas. For a 1-m-long bundle that is composed of 40 fibers each with an inner diameter of 0.7 mm, the straight loss is about 1.2 dB. The bundle also offers advantages of easy beam coupling and a high damage threshold.

Original language	English
Article number	106501
Journal	Optical Engineering
Volume	44
Issue number	10
DOIs	https://doi.org/10.1117/1.2077047
Publication status	Published - 2005 Oct

Keywords

Excimer laser
Fiber bundle
Hollow fiber

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10.1117/1.2077047

Cite this

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abstract = "A bundle of aluminum hollow-core fibers is used to deliver ArF-excimer-laser light. The hollow cores are purged by a simple gas injection system to prevent the generation of ozone gas. For a 1-m-long bundle that is composed of 40 fibers each with an inner diameter of 0.7 mm, the straight loss is about 1.2 dB. The bundle also offers advantages of easy beam coupling and a high damage threshold.",

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N2 - A bundle of aluminum hollow-core fibers is used to deliver ArF-excimer-laser light. The hollow cores are purged by a simple gas injection system to prevent the generation of ozone gas. For a 1-m-long bundle that is composed of 40 fibers each with an inner diameter of 0.7 mm, the straight loss is about 1.2 dB. The bundle also offers advantages of easy beam coupling and a high damage threshold.

AB - A bundle of aluminum hollow-core fibers is used to deliver ArF-excimer-laser light. The hollow cores are purged by a simple gas injection system to prevent the generation of ozone gas. For a 1-m-long bundle that is composed of 40 fibers each with an inner diameter of 0.7 mm, the straight loss is about 1.2 dB. The bundle also offers advantages of easy beam coupling and a high damage threshold.

KW - Excimer laser

KW - Fiber bundle

KW - Hollow fiber

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Bundled aluminum hollow-core fibers for delivery of ultraviolet laser beams

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Keywords

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