TY - JOUR
T1 - Buried interfaces in Mo/Si multilayers studied by soft-X-ray emission spectroscopy
AU - Miyata, Noboni
AU - Ishikawa, Sadayuki
AU - Yanagihara, Mihiro
AU - Watanabe, Makoto
N1 - Funding Information:
This work was partially supported by funds from the Global COE Program (Center of Excellence for Atomically Controlled Fabrication Technology) and the Program of Quantum Engineering Design Course (QEDC) from the Ministry of Education, Culture, Sports, Science and Technology (MEXT). This work was also partially supported by a JSPS Grant-in-Aid for Scientific Research on Innovative Areas “3D Active-Site Science”, Grant No. 26105010 and JSPS KAKENHI Grant No. JP16K45678. Numerical calculations were carried out in the computer centers at Osaka University, the Institute for Solid State Physics, the University of Tokyo, and Tohoku University.
PY - 1999/11
Y1 - 1999/11
N2 - We measured the Si L23 soft-X-ray emission spectra for Mo/Si multilayers using monochromatized synchrotron radiation near the Si L23 absorption threshold. On the basis of the spectral analysis, it was determined that the interfaces of Mo/Si multilayers consist of Mo3Si interlayers of 0.8±0.1 nm in thickness. This study confirmed that soft-X-ray emission spectroscopy is a useful method of studying buried layers and interfaces nondestructively.
AB - We measured the Si L23 soft-X-ray emission spectra for Mo/Si multilayers using monochromatized synchrotron radiation near the Si L23 absorption threshold. On the basis of the spectral analysis, it was determined that the interfaces of Mo/Si multilayers consist of Mo3Si interlayers of 0.8±0.1 nm in thickness. This study confirmed that soft-X-ray emission spectroscopy is a useful method of studying buried layers and interfaces nondestructively.
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U2 - 10.1143/jjap.38.6476
DO - 10.1143/jjap.38.6476
M3 - Article
AN - SCOPUS:0033330245
SN - 0021-4922
VL - 38
SP - 6476
EP - 6478
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 11
ER -