Cantilevered actuator using magnetostrictive thin film

This paper describes a cantilevered magnetic actuator driven by magnetostriction in a low magnetic field. The dimensions of the two layers actuator were 1×5 mm and amorphous FeSiB was used as the magnetostrictive material. Since the FeSiB has excellent soft magnetic characteristics, the actuator with FeSiB was able to work in magnetic field strength of less than 10 kA/m. The theoretical formulas for the amount of the displacement and the force of the actuator were obtained. The theoretical results agreed with the experimental one. According to the theoretical formula, the displacement was calculated with the parameter of the mechanical properties of the substrate. To obtain the large displacement, the actuator with Co substrate was designed based on the theoretical formula. The displacement of 153 μm was obtained using Cu substrate of 1.1 μm thickness in the magnetic field of 10 kA/m.