TY - GEN
T1 - Capability of LiTaO3/Quartz HAL SAW Resonators Confirmed by Simulation and Measurement
AU - Kadota, Michio
AU - Ishii, Yoshimi
AU - Tanaka, Shuji
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/4
Y1 - 2019/4
N2 - This paper reports hetero acoustic layer (HAL) surface acoustic wave (SAW) resonators using a thin LiTaO3 (LT) plate with negative TCF and a quartz substrate with positive TCF. In the previous study, a high impedance (Z) ratio (82 dB), an excellent temperature coefficient of frequency (TCF: 2 ppm/°C), and spurious-free characteristic up to 14 GHz were demonstrated. In this study, two kinds of LT/ quartz HAL SAW resonators with different wavelengths of interdigital transducer (IDT) were fabricated, and measured results were compared with simulated ones. The measured bandwidths (BWs) roughly agreed with the simulated ones. Although many measured values of Z ratios are lower than the simulated ones, the best Z ratios among them are similar to the simulated ones. This result is reasonable taking account of the imperfectness of laboratory-level fabrication, and suggests that the simulation in this study well predicts the performance of real devices.
AB - This paper reports hetero acoustic layer (HAL) surface acoustic wave (SAW) resonators using a thin LiTaO3 (LT) plate with negative TCF and a quartz substrate with positive TCF. In the previous study, a high impedance (Z) ratio (82 dB), an excellent temperature coefficient of frequency (TCF: 2 ppm/°C), and spurious-free characteristic up to 14 GHz were demonstrated. In this study, two kinds of LT/ quartz HAL SAW resonators with different wavelengths of interdigital transducer (IDT) were fabricated, and measured results were compared with simulated ones. The measured bandwidths (BWs) roughly agreed with the simulated ones. Although many measured values of Z ratios are lower than the simulated ones, the best Z ratios among them are similar to the simulated ones. This result is reasonable taking account of the imperfectness of laboratory-level fabrication, and suggests that the simulation in this study well predicts the performance of real devices.
KW - hetero acoustic layer
KW - impedance ratio
KW - LiTaO3
KW - LT thickness
KW - quartz
KW - SAW resonator
KW - simulation
UR - http://www.scopus.com/inward/record.url?scp=85073796119&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85073796119&partnerID=8YFLogxK
U2 - 10.1109/FCS.2019.8856040
DO - 10.1109/FCS.2019.8856040
M3 - Conference contribution
AN - SCOPUS:85073796119
T3 - IFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings
BT - IFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2019
Y2 - 14 April 2019 through 18 April 2019
ER -