Tins paper desenbes the design and experimental results of C'MUTs (Capacitive Mieromachined Ultrasonic Transducers) using an anodically bondable LTCC (Low Temperature C'o-fired Ceramics) wafer. Electrical connection of the C'MUTs top electrode and the LTCC via were successfully performed at a tune of anodic bondmg by forming Au bump on the electrode. The vibration characteristics of the membrane were measured by a laser Doppler \ibrometer both in the atmosphere and in the water. Ultrasonic pressure signal of CMUTs arrays was measured using hydrophone.
- Anodic bondmg
- CMUTs (capacitive micromacliiiied ultrasonic transducers)
- LTCC substrate