Carbonization of Si Surface

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	992-1000
Number of pages	9
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	41
Issue number	12
DOIs	https://doi.org/10.3131/jvsj.41.992
Publication status	Published - 1998 Jan

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@article{3112e687ff2e4d1983e2c471e417ed09,

title = "Carbonization of Si Surface",

author = "Isao Kusunoki and Tsuyoshi Takaoka",

year = "1998",

month = jan,

doi = "10.3131/jvsj.41.992",

language = "English",

volume = "41",

pages = "992--1000",

journal = "Shinku/Journal of the Vacuum Society of Japan",

issn = "0559-8516",

publisher = "Shinku Kyokai",

number = "12",

}

TY - JOUR

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AU - Kusunoki, Isao

AU - Takaoka, Tsuyoshi

PY - 1998/1

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U2 - 10.3131/jvsj.41.992

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SN - 0559-8516

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SP - 992

EP - 1000

JO - Shinku/Journal of the Vacuum Society of Japan

JF - Shinku/Journal of the Vacuum Society of Japan

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ER -