Catalyst combustors with B-doped SiGe/Au thermopile for micro-power-generation

Maiko Nishibori, Woosuck Shin, Kazuki Tajima, Lionel F. Houlet, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

A micromachined thermoelectric (TE) power generator with a ceramic catalyst combustor operating at room temperature (RT) has been developed. A thermopile of 20 thin-film couples of B-doped Si0.8Ge0.2/Au and a Pt-loaded alumina ceramic thickfilm catalyst combustor were integrated on a thin dielectric membrane, which was fabricated by bulk-Si wet etching. We have demonstrated a successful power generation of 0.26 μW using the micro-TE-generator with a fuel gas flow of 3 vol. % H2 in air, 1000 ccm, at RT.

Original languageEnglish
Pages (from-to)L1130-L1132
JournalJapanese Journal of Applied Physics
Volume45
Issue number42-45
DOIs
Publication statusPublished - 2006 Nov 10

Keywords

  • Catalyst combustor
  • Micro-power-generation
  • SIGe
  • Thermoelectric
  • Thermopile

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