Characteristics And Analysis Of A Thin Film Inductor With Closed Magnetic Circuit Structure

M. Yamaguchi; S. Arakawa; H. Ohzeki; Y. Hayashi; K. I. Arai

doi:10.1109/20.179702

Characteristics And Analysis Of A Thin Film Inductor With Closed Magnetic Circuit Structure

M. Yamaguchi, S. Arakawa, H. Ohzeki, Y. Hayashi, K. I. Arai

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

A trial spiral inductor with closed magnetic circuit was fabricated by RF sputtering machine and photolithography techniques. The inductance was twice as large as that of a reference sandwiched inductor. We analyzed the frequency characteristics of the proposed inductor from three points of view: Inner current distribution, flux distribution and eddy current in the magnetic film. The calculated results agree with the measured ones.

Original language	English
Pages (from-to)	3015-3017
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	28
Issue number	5
DOIs	https://doi.org/10.1109/20.179702
Publication status	Published - 1992 Sept

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/20.179702

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title = "Characteristics And Analysis Of A Thin Film Inductor With Closed Magnetic Circuit Structure",

abstract = "A trial spiral inductor with closed magnetic circuit was fabricated by RF sputtering machine and photolithography techniques. The inductance was twice as large as that of a reference sandwiched inductor. We analyzed the frequency characteristics of the proposed inductor from three points of view: Inner current distribution, flux distribution and eddy current in the magnetic film. The calculated results agree with the measured ones.",

author = "M. Yamaguchi and S. Arakawa and H. Ohzeki and Y. Hayashi and Arai, {K. I.}",

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AU - Yamaguchi, M.

AU - Arakawa, S.

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AU - Hayashi, Y.

AU - Arai, K. I.

PY - 1992/9

Y1 - 1992/9

N2 - A trial spiral inductor with closed magnetic circuit was fabricated by RF sputtering machine and photolithography techniques. The inductance was twice as large as that of a reference sandwiched inductor. We analyzed the frequency characteristics of the proposed inductor from three points of view: Inner current distribution, flux distribution and eddy current in the magnetic film. The calculated results agree with the measured ones.

AB - A trial spiral inductor with closed magnetic circuit was fabricated by RF sputtering machine and photolithography techniques. The inductance was twice as large as that of a reference sandwiched inductor. We analyzed the frequency characteristics of the proposed inductor from three points of view: Inner current distribution, flux distribution and eddy current in the magnetic film. The calculated results agree with the measured ones.

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Characteristics And Analysis Of A Thin Film Inductor With Closed Magnetic Circuit Structure

Abstract

ASJC Scopus subject areas

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