Characteristics of a large diameter radio-frequency negative hydrogen ion source

Yuko Sasaki; Sho Takayama; Haruhisa Nakano; Atsushi Komuro; Kazunori Takahashi; Akira Ando

doi:10.1585/pfr.11.2405088

Characteristics of a large diameter radio-frequency negative hydrogen ion source

Yuko Sasaki, Sho Takayama, Haruhisa Nakano, Atsushi Komuro, Kazunori Takahashi, Akira Ando

ENG - Electrical Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The characteristics of a 230-mm-diameter radio-frequency (rf) negative hydrogen ion source are investigated by the measurements of electron density and temperature. A hydrogen plasma is produced by an inductively coupled discharge operated with an rf frequency of 300 kHz and a power of a few tens of kW, where a fieldeffect- transistor-based inverter power supply is used as an rf generator. The ion source has a magnetic filter for reduction of the electron temperature near the plasma grid used for the extraction of a negative ion beam. A high electron density greater than 10¹⁸ m^-3 is successfully obtained for an operating gas pressure of 0.3 Pa. The electron temperature near the plasma grid is observed to decrease to about 1 eV with increasing magnetic field strength of the magnetic filter.

Original language	English
Article number	2405088
Journal	Plasma and Fusion Research
Volume	11
Issue number	1
DOIs	https://doi.org/10.1585/pfr.11.2405088
Publication status	Published - 2016

Keywords

FET-based inverter rf power supply
Ion source
NBI
Negative hydrogen ion
RF ion source

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10.1585/pfr.11.2405088

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title = "Characteristics of a large diameter radio-frequency negative hydrogen ion source",

abstract = "The characteristics of a 230-mm-diameter radio-frequency (rf) negative hydrogen ion source are investigated by the measurements of electron density and temperature. A hydrogen plasma is produced by an inductively coupled discharge operated with an rf frequency of 300 kHz and a power of a few tens of kW, where a fieldeffect- transistor-based inverter power supply is used as an rf generator. The ion source has a magnetic filter for reduction of the electron temperature near the plasma grid used for the extraction of a negative ion beam. A high electron density greater than 1018 m-3 is successfully obtained for an operating gas pressure of 0.3 Pa. The electron temperature near the plasma grid is observed to decrease to about 1 eV with increasing magnetic field strength of the magnetic filter.",

keywords = "FET-based inverter rf power supply, Ion source, NBI, Negative hydrogen ion, RF ion source",

author = "Yuko Sasaki and Sho Takayama and Haruhisa Nakano and Atsushi Komuro and Kazunori Takahashi and Akira Ando",

note = "Publisher Copyright: {\textcopyright} 2016 The Japan Society of Plasma.",

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doi = "10.1585/pfr.11.2405088",

language = "English",

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journal = "Plasma and Fusion Research",

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publisher = "The Japan Society of Plasma Science and Nuclear Fusion Research (JSPF)",

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TY - JOUR

T1 - Characteristics of a large diameter radio-frequency negative hydrogen ion source

AU - Sasaki, Yuko

AU - Takayama, Sho

AU - Nakano, Haruhisa

AU - Komuro, Atsushi

AU - Takahashi, Kazunori

AU - Ando, Akira

PY - 2016

Y1 - 2016

N2 - The characteristics of a 230-mm-diameter radio-frequency (rf) negative hydrogen ion source are investigated by the measurements of electron density and temperature. A hydrogen plasma is produced by an inductively coupled discharge operated with an rf frequency of 300 kHz and a power of a few tens of kW, where a fieldeffect- transistor-based inverter power supply is used as an rf generator. The ion source has a magnetic filter for reduction of the electron temperature near the plasma grid used for the extraction of a negative ion beam. A high electron density greater than 1018 m-3 is successfully obtained for an operating gas pressure of 0.3 Pa. The electron temperature near the plasma grid is observed to decrease to about 1 eV with increasing magnetic field strength of the magnetic filter.

AB - The characteristics of a 230-mm-diameter radio-frequency (rf) negative hydrogen ion source are investigated by the measurements of electron density and temperature. A hydrogen plasma is produced by an inductively coupled discharge operated with an rf frequency of 300 kHz and a power of a few tens of kW, where a fieldeffect- transistor-based inverter power supply is used as an rf generator. The ion source has a magnetic filter for reduction of the electron temperature near the plasma grid used for the extraction of a negative ion beam. A high electron density greater than 1018 m-3 is successfully obtained for an operating gas pressure of 0.3 Pa. The electron temperature near the plasma grid is observed to decrease to about 1 eV with increasing magnetic field strength of the magnetic filter.

KW - FET-based inverter rf power supply

KW - Ion source

KW - NBI

KW - Negative hydrogen ion

KW - RF ion source

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VL - 11

JO - Plasma and Fusion Research

JF - Plasma and Fusion Research

IS - 1

M1 - 2405088

ER -

Characteristics of a large diameter radio-frequency negative hydrogen ion source

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