Characteristics of buckled bridges and lifted micromirror using film stress

M. Sasaki; K. Hane; D. Briand; W. Noell; N. De Rooij

doi:10.1109/omems.2006.1708275

Characteristics of buckled bridges and lifted micromirror using film stress

M. Sasaki, K. Hane, D. Briand, W. Noell, N. De Rooij

New Industry Creation Hatchery Center (NICHe)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Publisher	IEEE Computer Society
Pages	82-83
Number of pages	2
ISBN (Print)	078039562X, 9780780395626
DOIs	https://doi.org/10.1109/omems.2006.1708275
Publication status	Published - 2006
Event	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States Duration: 2006 Aug 21 → 2006 Aug 24

Publication series

Name	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Conference

Conference	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Country/Territory	United States
City	Big Sky, MT
Period	06/8/21 → 06/8/24

Access to Document

10.1109/omems.2006.1708275

Cite this

Sasaki, M., Hane, K., Briand, D., Noell, W., & De Rooij, N. (2006). Characteristics of buckled bridges and lifted micromirror using film stress. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 (pp. 82-83). Article 1708275 (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006). IEEE Computer Society. https://doi.org/10.1109/omems.2006.1708275

@inproceedings{3e325e51667e4ce294f96e4e36603180,

title = "Characteristics of buckled bridges and lifted micromirror using film stress",

author = "M. Sasaki and K. Hane and D. Briand and W. Noell and {De Rooij}, N.",

year = "2006",

doi = "10.1109/omems.2006.1708275",

language = "English",

isbn = "078039562X",

series = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",

publisher = "IEEE Computer Society",

pages = "82--83",

booktitle = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006",

address = "United States",

note = "IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 ; Conference date: 21-08-2006 Through 24-08-2006",

}

Sasaki, M, Hane, K, Briand, D, Noell, W & De Rooij, N 2006, Characteristics of buckled bridges and lifted micromirror using film stress. in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006., 1708275, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, IEEE Computer Society, pp. 82-83, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, United States, 06/8/21. https://doi.org/10.1109/omems.2006.1708275

Characteristics of buckled bridges and lifted micromirror using film stress. / Sasaki, M.; Hane, K.; Briand, D. et al.
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. IEEE Computer Society, 2006. p. 82-83 1708275 (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Characteristics of buckled bridges and lifted micromirror using film stress

AU - Sasaki, M.

AU - Hane, K.

AU - Briand, D.

AU - Noell, W.

AU - De Rooij, N.

PY - 2006

Y1 - 2006

UR - http://www.scopus.com/inward/record.url?scp=41549133188&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=41549133188&partnerID=8YFLogxK

U2 - 10.1109/omems.2006.1708275

DO - 10.1109/omems.2006.1708275

M3 - Conference contribution

AN - SCOPUS:41549133188

SN - 078039562X

SN - 9780780395626

T3 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

SP - 82

EP - 83

BT - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

PB - IEEE Computer Society

T2 - IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Y2 - 21 August 2006 through 24 August 2006

ER -

Sasaki M, Hane K, Briand D, Noell W, De Rooij N. Characteristics of buckled bridges and lifted micromirror using film stress. In IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. IEEE Computer Society. 2006. p. 82-83. 1708275. (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006). doi: 10.1109/omems.2006.1708275

Characteristics of buckled bridges and lifted micromirror using film stress

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