TY - JOUR
T1 - Characteristics of copper spiral inductors utilizing FePt nanodot films
AU - Jeong, Woo Cheol
AU - Kiyoyama, Kouji
AU - Lee, Kang Wook
AU - Noriki, Akihiro
AU - Murugesan, Mariappan
AU - Fukushima, Takafumi
AU - Tanaka, Tetsu
AU - Koyanagi, Mitsumasa
PY - 2009/4
Y1 - 2009/4
N2 - We propose a novel Cu spiral inductor with an FePt magnetic nanodot (MND) layer of FePt magnetic nanodots dispersed in SiO2 film by self-assembled nanodot desposition (SAND). We expected an increase in inductance by adopting an MND layer. Nanodot sizes ranging from 2.5 to 3.5nm in diameter can be well controlled. By optimizing thermal annealing conditions, we formed an FePt MND film with an electromagnetic permeability of 7.7 for passive devices used in a standard radio-frequency integrated circuit (RFIC) process. The quality factors of various spiral inductors were simulated and compared with the measured quality factors of the Cu spiral inductors we fabricated. In addition, the high-frequency characteristics of Cu spiral inductors were successfully observed.
AB - We propose a novel Cu spiral inductor with an FePt magnetic nanodot (MND) layer of FePt magnetic nanodots dispersed in SiO2 film by self-assembled nanodot desposition (SAND). We expected an increase in inductance by adopting an MND layer. Nanodot sizes ranging from 2.5 to 3.5nm in diameter can be well controlled. By optimizing thermal annealing conditions, we formed an FePt MND film with an electromagnetic permeability of 7.7 for passive devices used in a standard radio-frequency integrated circuit (RFIC) process. The quality factors of various spiral inductors were simulated and compared with the measured quality factors of the Cu spiral inductors we fabricated. In addition, the high-frequency characteristics of Cu spiral inductors were successfully observed.
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U2 - 10.1143/JJAP.48.04C157
DO - 10.1143/JJAP.48.04C157
M3 - Article
AN - SCOPUS:77952495048
SN - 0021-4922
VL - 48
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 4 PART 2
M1 - 04C157
ER -