Characteristics of copper spiral inductors utilizing FePt nanodot films

Woo Cheol Jeong, Kouji Kiyoyama, Kang Wook Lee, Akihiro Noriki, Mariappan Murugesan, Takafumi Fukushima, Tetsu Tanaka, Mitsumasa Koyanagi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


We propose a novel Cu spiral inductor with an FePt magnetic nanodot (MND) layer of FePt magnetic nanodots dispersed in SiO2 film by self-assembled nanodot desposition (SAND). We expected an increase in inductance by adopting an MND layer. Nanodot sizes ranging from 2.5 to 3.5nm in diameter can be well controlled. By optimizing thermal annealing conditions, we formed an FePt MND film with an electromagnetic permeability of 7.7 for passive devices used in a standard radio-frequency integrated circuit (RFIC) process. The quality factors of various spiral inductors were simulated and compared with the measured quality factors of the Cu spiral inductors we fabricated. In addition, the high-frequency characteristics of Cu spiral inductors were successfully observed.

Original languageEnglish
Article number04C157
JournalJapanese Journal of Applied Physics
Issue number4 PART 2
Publication statusPublished - 2009 Apr


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