Characteristics of hydrogen negative ion source with FET based RF system

A. Ando, T. Matsuno, T. Funaoi, N. Tanaka, K. Tsumori, Y. Takeiri

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Citations (Scopus)

Abstract

Characteristics of radio frequency (RF) plasma production were investigated using a FET inverter power supply as a RF generator. High density hydrogen plasma was obtained using an external coil wound a cylindrical ceramic tube (driver region) with RF frequency of lower than 0.5MHz. When an axial magnetic field around 10mT was applied to the driver region, an electron density increased drastically and attained to over 1019m-3 in the driver region. Effect of the axial magnetic field in driver and expansion region was examined. Lower gas pressure operation below 0.5Pa was possible with higher RF frequency. H- density in the expansion region was measured by using laser photo-detachment system. It decreased as the axial magnetic field applied, which was caused by the increase of energetic electron from the driver.

Original languageEnglish
Title of host publicationSecond International Symposium on Negative Ions, Beams and Sources, NIBS2010
Pages322-328
Number of pages7
DOIs
Publication statusPublished - 2011
Event2nd International Symposium on Negative Ions, Beams and Sources, NIBS2010 - Takayama City, Japan
Duration: 2010 Nov 162010 Nov 19

Publication series

NameAIP Conference Proceedings
Volume1390
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference2nd International Symposium on Negative Ions, Beams and Sources, NIBS2010
Country/TerritoryJapan
CityTakayama City
Period10/11/1610/11/19

Keywords

  • FET inverter
  • Ion source
  • Neutral beam injector
  • RF plasma

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