Calcium phosphate films were prepared on commercially pure titanium (CP-Ti) substrates by RF magnetron sputtering using β-tricalcium phosphate targets. XRD and FTIR analyses showed that the films consisted of amorphous calcium phosphate and oxyapatite phases. The (002) preferred orientation of the oxyapatite phase was observed depending on the oxygen gas concentration in the sputtering gas. The surface reactions of the calcium phosphate films were investigated in Hanks' solution and PBS(-). Apatite crystallites were detected on the films after immersion for 7 days. An active surface reaction was observed on the amorphous calcium phosphate films during immersion in PBS(-). The CP-Ti plates coated with the calcium phosphate films were placed on the mandible of male Japanese white rabbits. These results suggest that the calcium phosphate coating improves the biocompatibility of titanium implants with bone.