Characterization of deposited materials formed by focused ion beam-induced chemical vapor deposition using an AuSi alloyed metal source

T. Yo; H. Tanaka; K. Koreyama; T. Nagata; Y. Sakuma; K. Nakajima; T. Chikyow; J. Yanagisawa; A. Sakai

doi:10.1109/IMNC.2007.4456148

Characterization of deposited materials formed by focused ion beam-induced chemical vapor deposition using an AuSi alloyed metal source

T. Yo, H. Tanaka, K. Koreyama, T. Nagata, Y. Sakuma, K. Nakajima, T. Chikyow, J. Yanagisawa, A. Sakai

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	150-151
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456148
Publication status	Published - 2007
Externally published	Yes
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 2007 Nov 5 → 2007 Nov 8

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Other

Other	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	07/11/5 → 07/11/8

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/IMNC.2007.4456148

Cite this

Yo, T., Tanaka, H., Koreyama, K., Nagata, T., Sakuma, Y., Nakajima, K., Chikyow, T., Yanagisawa, J., & Sakai, A. (2007). Characterization of deposited materials formed by focused ion beam-induced chemical vapor deposition using an AuSi alloyed metal source. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 150-151). [4456148] (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456148

Characterization of deposited materials formed by focused ion beam-induced chemical vapor deposition using an AuSi alloyed metal source. / Yo, T.; Tanaka, H.; Koreyama, K. et al.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 150-151 4456148 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yo, T, Tanaka, H, Koreyama, K, Nagata, T, Sakuma, Y, Nakajima, K, Chikyow, T, Yanagisawa, J & Sakai, A 2007, Characterization of deposited materials formed by focused ion beam-induced chemical vapor deposition using an AuSi alloyed metal source. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456148, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 150-151, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 07/11/5. https://doi.org/10.1109/IMNC.2007.4456148

Yo T, Tanaka H, Koreyama K, Nagata T, Sakuma Y, Nakajima K et al. Characterization of deposited materials formed by focused ion beam-induced chemical vapor deposition using an AuSi alloyed metal source. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 150-151. 4456148. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). doi: 10.1109/IMNC.2007.4456148

Yo, T. ; Tanaka, H. ; Koreyama, K. et al. / Characterization of deposited materials formed by focused ion beam-induced chemical vapor deposition using an AuSi alloyed metal source. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 150-151 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

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title = "Characterization of deposited materials formed by focused ion beam-induced chemical vapor deposition using an AuSi alloyed metal source",

author = "T. Yo and H. Tanaka and K. Koreyama and T. Nagata and Y. Sakuma and K. Nakajima and T. Chikyow and J. Yanagisawa and A. Sakai",

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AU - Tanaka, H.

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AU - Nagata, T.

AU - Sakuma, Y.

AU - Nakajima, K.

AU - Chikyow, T.

AU - Yanagisawa, J.

AU - Sakai, A.

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M3 - Conference contribution

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SN - 9784990247249

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BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

Y2 - 5 November 2007 through 8 November 2007

ER -

Characterization of deposited materials formed by focused ion beam-induced chemical vapor deposition using an AuSi alloyed metal source

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ASJC Scopus subject areas

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