Characterization of ion implanted silicon and diamond by variable wavelength photoacoustic microscopy and scanning acoustic microscopy.

Physics

• Diamonds 100%
• Ion 66%
• Elasticity 66%
• Thermal Conductivity 33%
• Microscopy 33%
• Thermodynamic Properties 33%
• Silicon 33%
• Acoustic Microscopes 33%
• Images 33%
• Magnitude 33%
• Variations 33%

Engineering

• Wavelength 66%
• Crystalline Silicon 66%
• Thermal Conductivity 33%
• Subsurface 33%
• Micron 33%
• Film Quality 33%
• Scanning Acoustic Microscopy 33%
• Thickness 33%
• Reduction 33%
• Energy Engineering 33%
• Images 33%

Material Science

• Liquid Films 66%
• Silicon Ion 66%
• Elastic Constant 33%
• Characterization 33%