Characterization of submicron-scale periodic grooves by grazing incidence ultra-small-angle X-ray scattering

Physics

• Grazing Incidence 100%
• Small-Angle X-Ray Scattering 100%
• Standard 50%
• Width 50%
• Ratios 50%
• X Ray 50%
• Electron Beams 50%
• Wafer 50%
• Silicon 50%
• Diffraction 50%
• Atomic Force Microscopy 50%
• Lithography 50%
• X Ray Source 50%

Engineering

• Small Angle 100%
• Scattering 100%
• Good Agreement 50%
• Measurement 50%
• Laboratories 50%
• Silicon Wafer 50%
• Ray Source 50%
• Measurement System 50%
• Electron Optical Lithography 50%
• Atomic Force Microscopy 50%