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Chemical interaction of NF3 with Si (Part II): density functional calculation studies
A. Endou, T. W. Little, A. Yamada, K. Teraishi, M. Kubo, S. S.C. Ammal, A. Miyamoto, M. Kitajima, F. S. Ohuchi
Research output: Contribution to journal › Article › peer-review
13
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(Scopus)