Chemical state information of bulk specimens obtained by SEM-based soft-X-ray emission spectrometry

Masami Terauchi, Shogo Koshiya, Futami Satoh, Hideyuki Takahashi, Nobuo Handa, Takanori Murano, Masato Koike, Takashi Imazono, Masaru Koeda, Tetsuya Nagano, Hiroyuki Sasai, Yuki Oue, Zeno Yonezawa, Satoshi Kuramoto

    Research output: Contribution to journalArticlepeer-review

    31 Citations (Scopus)


    Electron-beam-induced soft-X-ray emission spectroscopy (SXES) that uses a grating spectrometer has been introduced to a conventional scanning electron microscope (SEM) for characterizing desired specimen areas of bulk materials. The spectrometer was designed as a grazing incidence flat-field optics by using aberration corrected (varied line spacing) gratings and a multichannel plate detector combined with a charge-coupled device camera, which has already been applied to a transmission electron microscope. The best resolution was confirmed as 0.13 eV at Mg L-emission (50 eV), which is comparable with that of recent dedicated electron energy-loss spectroscopy instruments. This SXES-SEM instrument presents density of states of simple metals of bulk Mg and Li. Apparent band-structure effects have been observed in Si L-emission of Si wafer, P L-emission of GaP wafer, and Al L-emissions of intermetallic compounds of AlCo, AlPd, Al2Pt, and Al2Au.

    Original languageEnglish
    Pages (from-to)692-697
    Number of pages6
    JournalMicroscopy and Microanalysis
    Issue number3
    Publication statusPublished - 2014 Jun


    • bulk specimen
    • chemical analysis
    • grating spectrometer
    • scanning electron microscope
    • soft-X-ray emission spectroscopy

    ASJC Scopus subject areas

    • Instrumentation


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