TY - JOUR
T1 - Chemical state information of bulk specimens obtained by SEM-based soft-X-ray emission spectrometry
AU - Terauchi, Masami
AU - Koshiya, Shogo
AU - Satoh, Futami
AU - Takahashi, Hideyuki
AU - Handa, Nobuo
AU - Murano, Takanori
AU - Koike, Masato
AU - Imazono, Takashi
AU - Koeda, Masaru
AU - Nagano, Tetsuya
AU - Sasai, Hiroyuki
AU - Oue, Yuki
AU - Yonezawa, Zeno
AU - Kuramoto, Satoshi
PY - 2014/6
Y1 - 2014/6
N2 - Electron-beam-induced soft-X-ray emission spectroscopy (SXES) that uses a grating spectrometer has been introduced to a conventional scanning electron microscope (SEM) for characterizing desired specimen areas of bulk materials. The spectrometer was designed as a grazing incidence flat-field optics by using aberration corrected (varied line spacing) gratings and a multichannel plate detector combined with a charge-coupled device camera, which has already been applied to a transmission electron microscope. The best resolution was confirmed as 0.13 eV at Mg L-emission (50 eV), which is comparable with that of recent dedicated electron energy-loss spectroscopy instruments. This SXES-SEM instrument presents density of states of simple metals of bulk Mg and Li. Apparent band-structure effects have been observed in Si L-emission of Si wafer, P L-emission of GaP wafer, and Al L-emissions of intermetallic compounds of AlCo, AlPd, Al2Pt, and Al2Au.
AB - Electron-beam-induced soft-X-ray emission spectroscopy (SXES) that uses a grating spectrometer has been introduced to a conventional scanning electron microscope (SEM) for characterizing desired specimen areas of bulk materials. The spectrometer was designed as a grazing incidence flat-field optics by using aberration corrected (varied line spacing) gratings and a multichannel plate detector combined with a charge-coupled device camera, which has already been applied to a transmission electron microscope. The best resolution was confirmed as 0.13 eV at Mg L-emission (50 eV), which is comparable with that of recent dedicated electron energy-loss spectroscopy instruments. This SXES-SEM instrument presents density of states of simple metals of bulk Mg and Li. Apparent band-structure effects have been observed in Si L-emission of Si wafer, P L-emission of GaP wafer, and Al L-emissions of intermetallic compounds of AlCo, AlPd, Al2Pt, and Al2Au.
KW - bulk specimen
KW - chemical analysis
KW - grating spectrometer
KW - scanning electron microscope
KW - soft-X-ray emission spectroscopy
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U2 - 10.1017/S1431927614000439
DO - 10.1017/S1431927614000439
M3 - Article
AN - SCOPUS:84903697538
SN - 1431-9276
VL - 20
SP - 692
EP - 697
JO - Microscopy and Microanalysis
JF - Microscopy and Microanalysis
IS - 3
ER -