Circular multilayer zone plate for high-energy x-ray nano-imaging

Takahisa Koyama; Hidekazu Takano; Shigeki Konishi; Takuya Tsuji; Hisataka Takenaka; Satoshi Ichimaru; Tadayuki Ohchi; Yasushi Kagoshima

doi:10.1063/1.3676165

Circular multilayer zone plate for high-energy x-ray nano-imaging

Takahisa Koyama, Hidekazu Takano, Shigeki Konishi, Takuya Tsuji, Hisataka Takenaka, Satoshi Ichimaru, Tadayuki Ohchi, Yasushi Kagoshima

Research output: Contribution to journal › Review article › peer-review

33 Citations (Scopus)

Abstract

A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi ₂ and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern.

Original language	English
Article number	013705
Journal	Review of Scientific Instruments
Volume	83
Issue number	1
DOIs	https://doi.org/10.1063/1.3676165
Publication status	Published - 2012 Jan
Externally published	Yes

ASJC Scopus subject areas

Instrumentation

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10.1063/1.3676165

Cite this

@article{0ca1424dbe1d4c75aec3b7b46d6f705f,

title = "Circular multilayer zone plate for high-energy x-ray nano-imaging",

abstract = "A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi 2 and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern.",

author = "Takahisa Koyama and Hidekazu Takano and Shigeki Konishi and Takuya Tsuji and Hisataka Takenaka and Satoshi Ichimaru and Tadayuki Ohchi and Yasushi Kagoshima",

note = "Funding Information: This work was supported by SENTAN, Japan Science and Technology Corporation (JST).",

year = "2012",

month = jan,

doi = "10.1063/1.3676165",

language = "English",

volume = "83",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics Publising LLC",

number = "1",

}

TY - JOUR

T1 - Circular multilayer zone plate for high-energy x-ray nano-imaging

AU - Koyama, Takahisa

AU - Takano, Hidekazu

AU - Konishi, Shigeki

AU - Tsuji, Takuya

AU - Takenaka, Hisataka

AU - Ichimaru, Satoshi

AU - Ohchi, Tadayuki

AU - Kagoshima, Yasushi

N1 - Funding Information: This work was supported by SENTAN, Japan Science and Technology Corporation (JST).

PY - 2012/1

Y1 - 2012/1

N2 - A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi 2 and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern.

AB - A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi 2 and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern.

UR - http://www.scopus.com/inward/record.url?scp=84859171476&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84859171476&partnerID=8YFLogxK

U2 - 10.1063/1.3676165

DO - 10.1063/1.3676165

M3 - Review article

C2 - 22299960

AN - SCOPUS:84859171476

SN - 0034-6748

VL - 83

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 1

M1 - 013705

ER -

Circular multilayer zone plate for high-energy x-ray nano-imaging

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